microPRO™ RTP


Selective laser annealing system for magnet sensor formation

Combining a state-of-the-art laser optic module with 3D-Micromac’s highly modular semiconductor platform, the compact microPROTM RTP provides selective annealing with high repeatability and high throughput. The system features a selective step-and-repeat spot for magnet sensor formation. The microPROTM RTP provides numerous advantages compared to existing annealing methods.


microPRO™ RTP offers:

  • High precision in both X and Y directions
  • Excellent selectivity for different sensor types
  • Multiple options for pulse energy and exposure area geometry
  • Free programable magnetic field strength and orientation
  • Very high energy homogeneity
  • ‚‚Integrated process monitoring

microPRO™ RTP – System Configuration

The microPRO™ RTP standard system configuration consists of:

  • Laser module
  • Alignment system
  • Integrated process monitor
  • Heated chuck
  • Magnet unit

Available options:

  • Fully automated cassette wafer handling (open, FOUP)
  • Wafer pre-aligner
  • ID Reader for wafer and/or cassette
  • SECS/GEM interface
  • Filter fan unit

Please contact us for more information!

Jan Klinger
Head of Sales and Product Management

+49 (0)371 40043-66 / -228
sales@3d-micromac.com

Das Team Sales & Product Management