microSHAPE™ Product Family

Laser Micromachining Systems for Processing Glass and Sapphire


3D-Micromac‘s microSHAPE™ laser system is a modular platform designed for high accurate and high dynamic processing of large and flat substrates. The high versatile system allows the processing of glass sheets up to GEN 8.5.

The system allows to combine different laser processes as well as the processing with multiple working heads. The availability of several handling and inspection options enables the system to be a highly efficient production platform.

Suitable for:

  • Strengthened and unstrengthened glass
  • Thickness range 0,03 – 3 mm
  • Process speed up to 1,5 m/sec
  • Laminates and one side coatings possible

Typical Processes

  • Non ablative cutting with ultrashort pulsed laser  (Filamentation)
  • Cleaving with CO2 laser
  • TLS (Thermal-Laser-Separation)
  • Engraving, Surface structuring


  • Robot loading
  • Inline integration
  • Stacking/cassette loading
  • Waste handling
  • Fully automatic optical alignment including height compensation
  • AOI (Automatic optical inspection)


3D-Micromac‘s microSHAPETM FSLA laser system is designed for high accuracy drilling and structuring of glass or Sapphire substrates using *FSLATM (Flow Supported Laser Ablation).

The high flexible system allows to process glass or sapphire wafers from 2″-8″ as well as strengthened or unstrengthened display glasses with bore holes, micro channels as well as complex microstructures with superior quality.

microSHAPE™ FSLA offers:

  • Integration of picosecond or femtosecond laser source
  • Various optical setups suitable for glass processing
  • Up to 2 parallel beam paths for simultaneous processing
  • Quick change of work piece clamping unit
  • User-friendly, flexible, upgradeable system control

Configuration packages

  • Hole drilling set-up
  • Structuring set-up


  • Second beam path for simultaneous processing of two identical samples
  • fs lasersource
  • 1064 nm beam path instead of 532 nm
  • Automatic handling

Please contact us for more information!

Jan Klinger
Head of Sales and Product Management

+49 (0)371 40043-66 / -228

Das Team Sales & Product Management