microPREP™ PRO

Laser-Based Sample Preparation for Microstructure Diagnostics

The microPREP™ PRO system was developed to provide efficient laser sample preparation fitted to the needs of microstructure diagnostics and failure diagnostics. Therefore, with microPREP™ PRO material samples can be prepared effectively and economically by using an ultra-short pulse laser.

microPREP™ PRO allows to create complex and 3D-shaped samples to enable more comprehensive analysis of certain structures like in advanced packages, such as through silicon vias (TSVs), or even complete systems-in-package (SiP).

Furthermore, it is ideal to provide larger-sized samples with micron-level precision. The integrated overview camera assists in navigating on larger samples – the high-definition process camera allows for exact positioning.

Moreover, the application of a pico-second laser ensures virtually no structural damage and no elemental contamination of the material. In addition, microPREP™ PRO’s novel approach features substantially higher ablation rates in comparison to purely ion-beam-based processes.

The modular software design of microPREP™ ensures high flexibility for machining of samples for a broad range of microstructure diagnostics techniques. Based on machine-provided and customer-designed parameter-setups (recipes) microPREP™ PRO provides the best technology for sample preparation for:

  • Scanning Electron Microscopy (SEM),
  • Transmission Electron Microscopy (TEM),
  • X-ray Microscopy (XRM),
  • Atom-Probe Tomography (APT), and
  • Micromechanics.

Through ongoing development more and more areas of application are appearing on the market, in which microPREP™ PRO is able to assist in processing sample preparation for material analysis. Apart from mere preparation, samples can also be marked for easy tracking by microPREP™ PRO.

Contact

Please contact our technical sales team for more information.

Boris Rottwinkel
Tel: +49 371 40043-222
sales@3d-micromac.com

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