microSHAPE™ Product Family

Laser Micromachining Systems for Processing Glass and Sapphire


3D-Micromac‘s microSHAPE™ laser system is a modular platform designed for high accuracy separation of glass substrates. The high versatile system allows the processing of glass sheets up to GEN 8.5.

It combines two process steps, material modification – whether by TLS (Thermal-Laser-Separation) or Ghost Cutting filamentation process – and subsequent separation by laser based tempering or mechanical breaking in connected process modules. The modification processes are non-ablative and particle free.

Suitable for:

  • Strengthened and unstrengthened glass
  • Thickness up to 3mm
  • Cutting speed up to 1m/sec
  • Laminates and one side coatings possible

Configuration packages

microSHAPE™ GC

  • Cutting with ultrashort pulsed laser by filamentation


  • Cleaving with CO2 laser by Thermal-Laser-Separation
  • Set-up with multiple process heads available


  • Process modules for mechanical or laser based breaking
  • Transfer (module-to module)
  • Quality inspection
  • Automatic handling


3D-Micromac‘s microSHAPETM FSLA laser system is designed for high accuracy drilling and structuring of glass or Sapphire substrates using *FSLATM (Flow Supported Laser Ablation).

The high flexible system allows to process glass or sapphire wafers from 2″-8″ as well as strengthened or unstrengthened display glasses with bore holes, micro channels as well as complex microstructures with superior quality.

microSHAPE™ FSLA offers:

  • Integration of picosecond or femtosecond laser source
  • Various optical setups suitable for glass processing
  • Up to 2 parallel beam paths for simultaneous processing
  • Quick change of work piece clamping unit
  • User-friendly, flexible, upgradeable system control

Configuration packages

  • Hole drilling set-up
  • Structuring set-up


  • Second beam path for simultaneous processing of two identical samples
  • fs lasersource
  • 1064 nm beam path instead of 532 nm
  • Automatic handling

Please contact us for more information!

Jan Klinger
Head of Sales and Product Management

+49 (0)371 40043-66 / -228

Das Team Sales & Product Management