Laser Structuring and Selective Ablation

Lasers are, based on the outstanding ability to narrowly focus them, capable of extremely precisely and even selectively ablate materials from metals, ceramics, polymers or multilayer stacks.

Laser machining offers a unique and digital option to achieve maximum quality and precision whilst guaranteeing highest efficiency and throughput. Selective as well as contactless material ablation are very important for defined processes.

Machining in this range is preferably done with short pulsed or ultra short pulsed lasers. A prerequisite for the effective implementation of laser structuring is the use of a laser source with optimal beam quality at very high output powers and pulse repetition rates. These laser sources allow for the generation of smallest possible micro patterns in the range of a few micrometers, the fabrication of 3D objects, and the selective ablation of functional layers and coatings.

These technologies are utilized in different fields of application, such as:

surface modification in medical device technology and microfluidics
scribing and patterning in semiconductor and photovoltaics industry
removal of layers and coatings, e.g. ITO/TCO, on flexible electronic components including LED, µLED and OLED technologies,
2D or 3D structuring, and
laser micro engravings.

Contact:

Please contact our technical sales team for more information.

Frank Richter
Tel: +49 371 40043-222
sales@3d-micromac.com

Laser Structuring in Photovoltaics

The utilization of lasers in manufacturing of solar cells guarantees high efficiency and throughput at best attainable precision and minor material damage. Particular advantages of laser machining consist in contactless energy insertion, the capability of flexible beam guidance, and the exact control over supply of energy. Damage to the material is avoided that way as well as failure rates are minimized.

Laser Contact Opening (LCO)Flexible Thin-Films

Laser Contact Opening (LCO) for PERC Solar Cells

PERC solar cells have the potential to deliver significantly higher levels of energy efficiency and production compared to standard solar cells. A critical step in the PERC solar cell manufacturing process is laser contact opening (LCO), which involves using a laser to create tiny pockets in the passivation film layer that is applied to the rear surface of the silicon wafer in order to allow more light to be absorbed by the solar cell.

3D-Micromac addresses this critical step with its microCELL OTF laser system, an industry-proven, high-productivity and low cost-of-ownership solution for mono- and polycrystalline silicon solar cells.

microCELL OTF relies on a laser source in the infrared range. Infrared laser sources cost less to acquire, last longer and require less maintenance. The achievable pulse frequencies are considerably higher than with green laser sources and ensuring a significantly higher throughput rate.

Featuring “on-the-fly” laser processing and superior uptime (up to 97 percent), microCELL OTF enables throughputs of up to 4,000 wafers per hour with no laser damage to underlying silicon layers. Contactless wafer handling enables processing without surface defects and microcracks, enabling maximum yields.

Application Results

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Recommended Laser System

microCELL™ – Systems for Laser Contact Opening (LCO)
The microCELL™ solutions are a highly productive laser systems for Laser Contact Opening (LCO) of high efficient PERC solar cells.

Laser Structuring of Flexible Thin-Film Solar Cells

Thin-film technologies on glass substrates and flexible substrates are proven applications in the photovoltaic industry. Cadmium telluride cells (CdTe) and copper indium gallium selenide modules (CIS/CIGS) are some of the technologies.

These transparent conductive layers (TCO), silicon and metal films are only a few micrometers thick and are selectively ablated in three process steps (P1, P2, P3) using lasers with different wavelengths (IR, VIS, UV). The usage of high performance laser in combination with high speed and high accurate machine solutions guarantee the required efficiency of the finished solar cells with a minimal loss of material.

With ist microFLEX roll-to-roll machining system 3D-Micromac provides powerful and highly precise laser systems for laser structuring of thin-film solar cells. Numerous process monitoring methods, including tracking and tracing of process parameters and online energy monitoring, ensure additional process reliability.

Application Results

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Recommended Laser System

microFLEX® - Roll to Roll Laser System for Processing of Flexible Substrates
The microFLEX System is a highly versatile production platform and the all-in-one solution for the manufacturing of flexible thin films in photovoltaics, electronics, medical devices, displays, and semiconductors.