Multidimension Technology Co., Ltd. orders microVEGA™ xMR selective laser annealing system from 3D-Micromac

3D-Micromac AG, the industry leader in laser micromachining and roll-to-roll laser systems for the semiconductor, photovoltaic, medical device and electronics markets, today announced the order intake for a microVEGA™ xMR selective laser annealing system from Multidimension Technology Co., Ltd.  Multidimension Technology (MTD) is one of the leading manufacturer of innovative high-performance, low-cost TMR magnetic sensors based in Zhangjiagang (Jiangsu Province, China), with branch offices in Ningbo, Shanghai, Chengdu and San Jose (Califonia, USA) will be using the microVEGA xMR for the production of TMR magnet sensors.

The microVEGA™ xMR selective laser annealing system provides several advantages over thermal annealing, that is traditionally used for magnetic sensor manufacturing. These advantages include higher precision that enable the processing of smaller magnetic device structures. This results in more devices per wafer, as well as the ability to set different reference magnetization directions on sensors across a single wafer. In addition, the microVEGA’s on-the-fly spot and variable laser energy provide the possibility of selective heating of the pinning layer in each sensor to “imprint” the intended magnetic orientation. Also, magnetic field strength and orientation is adjustable by recipe. High-temperature gradients ensurea low thermal impact on the sensors. Therefore, sensors can be processed directly next to read-out electronics as well as closer together. Such being the case, the production of smaller sensors becomes possible — which allows to process more devices per wafer with microVEGA™ xMR. Reduced process steps, simplified production flow, higher yield, and more cost-effective production of integrated monolithic sensor packages are the results.

More information on the microVEGA™ xMR selective laser annealing system is also available on https://3d-micromac.com/laser-micromachining/laser-micromachining-systems/microvega-xmr/ and in the whitepaper “Monolithic Magnetic Sensors Manufactured by Selective Laser Annealing” that is available on lasersensorformation.com.